A Micromachined Electrochemical Angular Accelerometer Based on Interdigital Electrodes. - Tian Liang; Junbo Wang 002; Deyong Chen; Jian Chen 012; Bowen Liu 016; Chao Xu; Wenjie Qi; Xu She; Mingwei Chen; Anxiang Zhong; Yumo Duan (NEMS, 2021)