A Novel MEMS Sensor with a Floating Cover Plate for Wall-Shear Stress Measurement in the Harsh Supersonic Flow. - Yunzhe Liu 006; Lei Shi; Yunjian Chen; Shengming Ma; Kai Cheng; Chuqiao Wang; Xingxu Zhang; Jian Luo 008; Binghe Ma (IEEE SENSORS, 2024)