Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC. - Michio Uneda; Naoki Takahashi; Takashi Fujita; Yutaro Arai (Int. J. Autom. Technol., 2021)