Closed-form solution for cycle time of revisiting processes in single-arm cluster tool scheduling with atomic layer deposition. - Yuxi Sun 004; Naiqi Wu; MengChu Zhou (ICNSC, 2011)

Cycle time analysis for wafer revisiting process in scheduling of single-arm cluster tools. - Yuxi Sun 004; Naiqi Wu (Int. J. Autom. Comput., 2011)