Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process. - Huiming Xu; Hong Zhang; Zhiqiang Deng; Haisheng San; Yuxi Yu (NEMS, 2013)

A Si-Glass based pressure sensor with a single piezoresistive element for harsh environment applications. - Hong Zhang; Huiming Xu; Yan Li; Zijun Song; Haisheng San; Yuxi Yu (NEMS, 2013)