An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques. - Haruo Yoda; Yozo Ohuchi; Yuzo Taniguchi; Masakazu Ejiri (IEEE Trans. Pattern Anal. Mach. Intell., 1988)

Automated visual inspection for lsi water multilayer patterns by cascade pattern matching algorithm. - Shunji Maeda; Hitoshi Kubota; Hiroshi Makihira; Takanori Ninomiya; Yasuo Nakagawa; Yuzo Taniguchi (Syst. Comput. Jpn., 1990)