A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing. - Xuechuan Shan; Ryutaro Maeda; Tsuyoshi Ikehara; Z. F. Wang; C. K. Wong (Int. J. Comput. Eng. Sci., 2003)

Chemical mechanical polishing of polymeric materials for MEMS applications. - Z. W. Zhong; Z. F. Wang; Y. H. Tan (Microelectron. J., 2006)

A Silicon-Based Micro Gas Turbine Engine for Power Generation - Xuechuan Shan; Z. F. Wang; Ryutaro Maeda; Y. F. Sun; M. Wu; J. S. Hua (CoRR, 2007)

Process Issues for a Multi-Layer Microelectrofluidic Platform - Sum Huag Ng; Z. F. Wang; R.-T. Tjeung; N. De Rooij (CoRR, 2007)

Formation of Embedded Microstructures by Thermal Activated Solvent Bonding - S. H. Ng; R.-T. Tjeung; Z. F. Wang; A. C. W. Lu; I. Rodriguez; N. De Rooij (CoRR, 2008)

Studies of Polymer Deformation and Recovery in Hot Embossing - Xuechuan Shan; Y. C. Liu; H. J. Lu; Z. F. Wang; Y. C. Lam (CoRR, 2008)

Fabrication of Embedded Microvalve on PMMA Microfluidic Devices through Surface Functionalization - A. G. G. Toh; Z. F. Wang; S. H. Ng (CoRR, 2008)