Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property. - Hui Tang 003; Jian Gao 002; Xin Chen 005; Kai-Ming Yu; Suet To; Yunbo He; Xun Chen 002; Zhaohe Zeng; Sifeng He; Chuangbin Chen; Yangmin Li 001 (IEEE Trans. Ind. Electron., 2018)