Capacitive micromachined ultrasonic transducer as a resonant temperature sensor. - Zhikang Li; Libo Zhao 001; Zhiying Ye; Hongyan Wang; Yulong Zhao; Zhuangde Jiang (NEMS, 2013)

Capacitive micromachined ultrasonic transducer for ultra-low pressure detection. - Zhikang Li; Libo Zhao 001; Zhuangde Jiang; Zhiying Ye; Yulong Zhao (NEMS, 2014)