A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining. - Ziqiang Qu; Huafeng Liu 002; Hao Ouyang; Chenyuan Hu; Liang Cheng Tu (IEEE SENSORS, 2020)

An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. - Xiaoxiao Song; Huafeng Liu 002; Yanyan Fang; Chun Zhao; Ziqiang Qu; Qiu Wang; Liang Cheng Tu (Sensors, 2020)

An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz1/2. - Shimin Jiao; Hao Ouyang; Ziqiang Qu; Qiu Wang; Huafeng Liu 002; Liang Cheng Tu (NEMS, 2023)

A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range. - Ziqiang Qu; Hao Ouyang; Wen Xiong; Qiangwei Xu; Yuan Wang 028; Huafeng Liu 002 (IEEE Trans. Ind. Electron., 2024)