A direct-drive SCARA robot for wafer&ceramic-substrate handling based on visual servoing. - Yunbo He; Chang Zhang; Wentao Ye; Zuoxiong He; Xin Chen 005; Jian Gao 002; Kai Zhang; Zhijun Yang; Xun Chen 002; Yun Chen 002; Hui Tang 003 (CIS/RAM, 2017)