Gottlieb S. Oehrlein

According to our database, Gottlieb S. Oehrlein authored at least 2 papers between 1992 and 1999.

Collaborative distances:

• Dijkstra number of seven.
• Erdős number of seven.

1999

Surface science issues in plasma etching.

Gottlieb S. Oehrlein, Marcus F. Doemling, Bernd E. E. Kastenmeier, Peter J. Matsuo, Neal R. Rueger, Marc Schaepkens, Theodorus E. F. M. Standaert

IBM J. Res. Dev., 1999

1992

Plasma-based dry etching techniques in the silicon integrated circuit technology.

Gottlieb S. Oehrlein, John F. Rembetski

IBM J. Res. Dev., 1992