Xiuguo Chen
Orcid: 0000-0002-7067-5084
  According to our database1,
  Xiuguo Chen
  authored at least 7 papers
  between 2008 and 2025.
  
  
Collaborative distances:
Collaborative distances:
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Bibliography
  2025
Ensemble Learning-Fused Solution to the Inverse Problem in Integrated Optical Critical Dimension Metrology.
    
  
    IEEE Trans. Instrum. Meas., 2025
    
  
  2024
Bootstrap Method for Uncertainty Evaluation in Critical Dimension Small-Angle X-Ray Scattering.
    
  
    IEEE Trans. Instrum. Meas., 2024
    
  
  2018
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions.
    
  
    Sensors, 2018
    
  
  2013
Optimal design of periodic nanostructures formed in solar cells as an antireflective layer.
    
  
    Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013
    
  
  2011
Zernike representation of angle-resolved Mueller matrix for dimensional analysis of nanoscale structures.
    
  
    Proceedings of the 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011
    
  
  2009
    Proceedings of the Web Information Systems and Mining, International Conference, 2009
    
  
  2008
Problem Oriented Analysis and Decision Expert System with large capacity knowledge-base.
    
  
    Proceedings of the 3rd International Conference on Intelligent System and Knowledge Engineering, 2008