Yuhu Xia
Orcid: 0000-0002-2943-1133Timeline
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Bibliography
2024
Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror.
CoRR, 2024
Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators.
Proceedings of the 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024, 2024
Proceedings of the 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024, 2024