A. Baunemann

According to our database1, A. Baunemann authored at least 1 paper in 2007.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of six.

Timeline

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Bibliography

2007
Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors.
Microelectron. Reliab., 2007


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