Bernd Barak

According to our database, Bernd Barak authored at least 3 papers between 2011 and 2013.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2013

Virtual Metrology in Semiconductor Manufacturing by Means of Predictive Machine Learning Models.

Benjamin Lenz, Bernd Barak, Julia Mührwald, Carolin Leicht

Proceedings of the 12th International Conference on Machine Learning and Applications, 2013

Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology.

Benjamin Lenz, Bernd Barak

Proceedings of the 46th Hawaii International Conference on System Sciences, 2013

2011

Regression methods for prediction of PECVD Silicon Nitride layer thickness.

Hendrik Purwins, Ahmed Nagi, Bernd Barak, Uwe Hockele, Andreas Kyek, Benjamin Lenz, Gunter Pfeifer, Kurt Weinzierl

Proceedings of the IEEE Conference on Automation Science and Engineering, 2011