Binghai Lyu

According to our database¹, Binghai Lyu authored at least 2 papers between 2024 and 2025.

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2025

Research on Wafer CMP Temperature Online Detection Compensation Algorithm Based on GA-BP Improved Neural Network.

[BibT_eX]

[DOI]

IEEE Access, 2025

2024

Stacking ensemble learning based material removal rate prediction model for CMP process of semiconductor wafer.

[BibT_eX]

[DOI]

Artif. Intell. Eng. Des. Anal. Manuf., 2024