C. Otani

According to our database1, C. Otani authored at least 2 papers in 2003.

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Bibliography

2003
Plasma etching of DLC films for microfluidic channels.
Microelectron. J., 2003

The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films.
Microelectron. J., 2003


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