Egor V. Ivanov
According to our database1,
Egor V. Ivanov authored at least 2 papers
between 2025 and 2026.
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Bibliography
2026
Physics-Informed Neural Systems for the Simulation of EUV Electromagnetic Wave Diffraction from a Lithography Mask.
CoRR, March, 2026
2025
Physics-informed neural networks and neural operators for a study of EUV electromagnetic wave diffraction from a lithography mask.
CoRR, July, 2025