Guo Can

According to our database¹, Guo Can authored at least 2 papers in 2010.

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2010

Structure design on MEMS TiN resonant pressure sensors.

[BibT_eX]

[DOI]

Proceedings of the 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2010

Investigation based on MEMS double Si3N4 resonant beams pressure sensor.

[BibT_eX]

[DOI]

Proceedings of the 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2010