Hiroshi Taka

According to our database, Hiroshi Taka authored at least 1 paper in 2015.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2015

Development of high-quality low-temperature (≤ 120°C) PECVD-SiN films by organosilane.

Hiroshi Taka, Katsumasa Suzuki, Norihiro Tsujioka, Shoichi Murakami

Proceedings of the 2015 International 3D Systems Integration Conference, 2015