Hisao Okuda

According to our database1, Hisao Okuda authored at least 1 paper in 2011.

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2011
Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam.
Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011


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