Jeff Shu

According to our database1, Jeff Shu authored at least 2 papers between 2012 and 2013.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of six.

Timeline

Legend:

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Article 
PhD thesis 
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Links

On csauthors.net:

Bibliography

2013
Impact of precursors choice on characteristics of PEALD SiN for spacer applications.
Proceedings of 2013 International Conference on IC Design & Technology, 2013

2012
Robust PEALD SiN spacer for gate first high-k metal gate integration.
Proceedings of the IEEE International Conference on IC Design & Technology, 2012


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