Matthew Tom

Orcid: 0000-0002-7892-7418

According to our database1, Matthew Tom authored at least 4 papers between 2022 and 2023.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of five.

Timeline

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Links

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Bibliography

2023
Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation.
Comput. Chem. Eng., October, 2023

2022
Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design.
Comput. Chem. Eng., 2022

Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching.
Comput. Chem. Eng., 2022

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor.
Comput. Chem. Eng., 2022


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