Megumi Katori

According to our database, Megumi Katori authored at least 1 paper in 2011.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2011

Technique for preparing defect-free high aspect ratio SU-8 resist structure using x-ray lithography.

Vijay K. Singh, Satoshi Maekawa, Megumi Katori, Yasuhito Minamiyama, Daiji Noda, Tadashi Hattori

Proceedings of the 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2011