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Meng Zhang

Orcid: 0000-0002-5228-8494

Affiliations:
  • Chinese Academy of Sciences, Institute of Semiconductors, Beijing, China
  • University of Chinese Academy of Sciences, College of Materials Science and Opto-Electronic Technology, Beijing, China


According to our database1, Meng Zhang authored at least 3 papers between 2015 and 2019.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of five.

Timeline

Legend:

Book  In proceedings  Article  PhD thesis  Dataset  Other 

Links

Online presence:

On csauthors.net:

Bibliography

2019
Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via.
[BibTeX]
[DOI]
Meng Zhang
,
Jian Yang
,
Yurong He
,
Fan Yang
,
Fuhua Yang
,
Guowei Han
,
Chaowei Si
,
Jin Ning
Sensors, 2019

2015
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications.
[BibTeX]
[DOI]
Meng Zhang
,
Jian Yang
,
Chaowei Si
,
Guowei Han
,
Yongmei Zhao
,
Jin Ning
Micromachines, 2015

Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators.
[BibTeX]
[DOI]
Jian Yang
,
Chaowei Si
,
Guowei Han
,
Meng Zhang
,
Liuhong Ma
,
Yongmei Zhao
,
Jin Ning
Micromachines, 2015


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