Michio Uneda

According to our database, Michio Uneda authored at least 6 papers between 2014 and 2025.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2025

Slurry Behavior on Traverse Polishing of Large-Scale Objects Using Small-Diameter Pads.

Michio Uneda, Kotaro Saito, Kyosuke Tenkou, Kazutoshi Hotta, Hitoshi Morinaga

Int. J. Autom. Technol., March, 2025

2022

Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores.

Michio Uneda, Nodoka Yamada, Yoshihiro Tawara

Int. J. Autom. Technol., 2022

2021

Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC.

Michio Uneda, Naoki Takahashi, Takashi Fujita, Yutaro Arai

Int. J. Autom. Technol., 2021

2018

Patterned Sapphire Substrates for III-Nitride Epitaxial Growth.

Natsuko Omiya, Hideo Aida, Yutaka Kimura, Yuki Kawamata, Seong-Woo Kim, Michio Uneda

Int. J. Autom. Technol., 2018

2015

Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher.

Michio Uneda, Keiichi Takano, Koji Koyama, Hideo Aida, Ken-Ichi Ishikawa

Int. J. Autom. Technol., 2015

2014

Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate.

Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi

Int. J. Autom. Technol., 2014