Mingsheng Cao

Orcid: 0000-0002-7921-863X

Affiliations:

Changchun Institute of Optics, Fine Mechanics, and Physics, Chinese Academy of Sciences, Changchun, China

According to our database¹, Mingsheng Cao authored at least 1 paper in 2020.

Collaborative distances:

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2020

Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning.

[DOI]

IEEE Access, 2020