Nguyen Hoang Tung

According to our database, Nguyen Hoang Tung authored at least 1 paper in 2024.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2024

Enhancing Si3N4 Selectivity over SiO2 in Low-RF Power NF3-O2 Reactive Ion Etching: The Effect of NO Surface Reaction.

Nguyen Hoang Tung, Heesoo Lee, Duy Khoe Dinh, Dae-Woong Kim, Jin Young Lee, Geon Woong Eom, Hyeong-U. Kim, Woo Seok Kang

Sensors, May, 2024