Niall MacGearailt

According to our database1, Niall MacGearailt authored at least 1 paper in 2012.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of five.

Timeline

Legend:

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PhD thesis 
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Links

On csauthors.net:

Bibliography

2012
Real-time virtual metrology and control of etch rate in an industrial plasma chamber.
Proceedings of the IEEE International Conference on Control Applications, 2012


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