Tae-Gyung Lee

According to our database, Tae-Gyung Lee authored at least 1 paper in 2023.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2023

Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods.

Tae-Gyung Lee, Tae-Sun Yu, Tae-Eog Lee

IEEE Trans Autom. Sci. Eng., July, 2023