Teruhisa Akashi

According to our database, Teruhisa Akashi authored at least 1 paper in 2008.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2008

Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching

Teruhisa Akashi, Yasuhiro Yoshimura

CoRR, 2008