Tyler Parent

According to our database, Tyler Parent authored at least 5 papers between 2000 and 2002.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2002

Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing.

I. G. Rosen, Tyler Parent, Baris Fidan, Chunming Wang, Anupam Madhukar

IEEE Trans. Control. Syst. Technol., 2002

An Elementary Model for Control of a Semiconductor Etching Process.

Anupam Madhukar, Tyler Parent, I. Gary Rosen, Chunming Wang

SIAM Rev., 2002

2001

A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films.

I. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar

IEEE Trans. Control. Syst. Technol., 2001

Multi-variable adaptive control of CF₄/O₂ plasma etching of silicon nitride thin films.

Baris Fidan, I. G. Rosen, Tyler Parent, Anupam Madhukar

Proceedings of the American Control Conference, 2001

2000

Spectroscopic ellipsometry (SE) based real-time control of CF₄/O₂ plasma etching of silicon nitride.

Baris Fidan, Tyler Parent, I. G. Rosen, Anupam Madhukar

Proceedings of the American Control Conference, 2000