Yi-Lung Cheng
According to our database1,
Yi-Lung Cheng
authored at least 2 papers
in 2015.
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Bibliography
2015
Electrical and reliability performance of atomic layer deposition HfO2 capping layer on porous low dielectric constant materials.
Proceedings of the IEEE International Reliability Physics Symposium, 2015
Thickness dependence on electrical and reliability properties for dense and porous low dielectric constant materials.
Proceedings of the IEEE International Reliability Physics Symposium, 2015