Yinglei Ma

According to our database, Yinglei Ma authored at least 3 papers between 2010 and 2012.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2012

Characterization of wafer-level XeF2 Gas-phase Isotropic Etching For MEMS Processing.

Dehui Xu, Bin Xiong, Guoqiang Wu, Yinglei Ma, Yuelin Wang, Errong Jing

Proceedings of the 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2012

Analysis of air damping in micromachined resonators.

Guoqiang Wu, Dehui Xu, Bin Xiong, Yinglei Ma, Yuelin Wang, Errong Jing

Proceedings of the 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2012

2010

Hybrid etching process and its application in thermopile infrared sensor.

Dehui Xu, Bin Xiong, Yuelin Wang, Yinglei Ma

Proceedings of the 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2010