Alexey Shaporin

Orcid: 0009-0005-9214-3571

According to our database¹, Alexey Shaporin authored at least 4 papers between 2012 and 2025.

Collaborative distances:

Dijkstra number² of five.
Erdős number³ of five.

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Bibliography

2025

Real-Time Interfacial Pressure Prediction in CMP Using Machine Learning Surrogates of Finite Element Simulations.

[BibT_eX]

[DOI]

Int. J. Autom. Technol., September, 2025

2020

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.

[BibT_eX]

[DOI]

Sensors, 2020

2012

CFD analysis of viscous losses in complex microsystems.

[BibT_eX]

[DOI]

Proceedings of the International Multi-Conference on Systems, Signals & Devices, 2012

MEMS acoustic emission sensor with mechanical noise rejection.

[BibT_eX]

[DOI]

Proceedings of the International Multi-Conference on Systems, Signals & Devices, 2012

Alexey Shaporin

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