Andrei Zenkevich

Orcid: 0000-0001-8221-1116

According to our database¹, Andrei Zenkevich authored at least 1 paper in 2007.

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2007

Degradation kinetics of ultrathin HfO<sub>2</sub> layers on Si(1 0 0) during vacuum annealing monitored with in situ XPS/LEIS and ex situ AFM.

[DOI]

Microelectron. Reliab., 2007