Che-Lung Wang

According to our database, Che-Lung Wang authored at least 1 paper in 2001.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2001

The Modeling and Control of the Cluster Tool in Semiconductor Fabrication.

Han-Pang Huang, Che-Lung Wang

Proceedings of the 2001 IEEE International Conference on Robotics and Automation, 2001