Henrik Wang

According to our database, Henrik Wang authored at least 3 papers between 2022 and 2025.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2025

Machine Learning-Based Endpoint-Detection Control System for an Atomic Layer Etching Process.

Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides

Proceedings of the 2025 American Control Conference, 2025

2023

Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation.

Matthew Tom, Henrik Wang, Feiyang Ou, Sungil Yun, Gerassimos Orkoulas, Panagiotis D. Christofides

Comput. Chem. Eng., October, 2023

2022

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor.

Matthew Tom, Sungil Yun, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides

Comput. Chem. Eng., 2022