Hideo Sunami

According to our database1, Hideo Sunami authored at least 4 papers in 1987.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of five.

Awards

IEEE Fellow

IEEE Fellow 1998, "For contributions to the development of trench-capacitor DRAM cells and ultra-high density DRAMs.".

Timeline

Legend:

Book 
In proceedings 
Article 
PhD thesis 
Dataset
Other 

Links

On csauthors.net:

Bibliography

1987
A Two-Dimensional Etching Profile Simulator: ESPRIT.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987

A Two-Dimensional Integrated Process Simulator: SPIRIT-I.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987

A Three-Dimensional Photoresist Imaging Process Simulator for Strong Standing-Wave Effect Environment.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987

Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate.
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987


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