I. J. Kim

According to our database1, I. J. Kim authored at least 1 paper in 2012.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of five.

Timeline

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Links

On csauthors.net:

Bibliography

2012
Silicon nitride etch characteristics in SF<sub>6</sub>/O<sub>2</sub> and C<sub>3</sub>F<sub>6</sub>O/O<sub>2</sub> plasmas and evaluation of their global warming effects.
Microelectron. Reliab., 2012


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