Kangtaek Lee

Orcid: 0000-0002-0845-8636

According to our database1, Kangtaek Lee authored at least 1 paper in 2007.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of six.

Timeline

Legend:

Book 
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Article 
PhD thesis 
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Links

On csauthors.net:

Bibliography

2007
A comparative study on a high aspect ratio contact hole etching in UFC- and PFC-containing plasmas.
Microelectron. J., 2007


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