Yil-Wook Kim

According to our database, Yil-Wook Kim authored at least 1 paper in 2007.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of six.

2007

A comparative study on a high aspect ratio contact hole etching in UFC- and PFC-containing plasmas.

Hyun-Kyu Ryu, Yil-Wook Kim, Kangtaek Lee, Chee Burm Shin, Chang-Koo Kim

Microelectron. J., 2007