Michael Fugger

According to our database, Michael Fugger authored at least 1 paper in 2014.

Collaborative distances:

• Dijkstra number of seven.
• Erdős number of six.

2014

Comparison of WTi and WTi(N) as diffusion barriers for Al and Cu metallization on Si with respect to thermal stability and diffusion behavior of Ti.

Michael Fugger, Mathias Plappert, Carsten Schäffer, Oliver Humbel, Herbert Hutter, Herbert Danninger, Mathias Nowottnick

Microelectron. Reliab., 2014