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Michael Lercel

Affiliations:
  • ASML US, Wilton, CT, USA


According to our database1, Michael Lercel authored at least 1 paper in 2022.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of five.

Timeline

Legend:

Book  In proceedings  Article  PhD thesis  Dataset  Other 

Links

On csauthors.net:

Bibliography

2022
Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond.
[BibTeX]
[DOI]
Martin van den Brink
,
Anthony Yen
,
Paul van Wijnen
,
Michael Lercel
,
Boudewijn Sluijk
Proceedings of the IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), 2022


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