Anthony Yen

Affiliations:

According to our database¹, Anthony Yen authored at least 2 papers between 1991 and 2022.

Collaborative distances:

Awards

IEEE Fellow 2018, "For leadership in extreme-ultraviolet lithography for high volume manufacture of integrated circuits".

Book

In proceedings

Article

PhD thesis

Dataset

Other

2022

Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond.

[BibT_eX]

[DOI]

Proceedings of the IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), 2022

1991

Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography.

[BibT_eX]

[DOI]

PhD thesis, 1991