Ming-Hua Hsiao

According to our database, Ming-Hua Hsiao authored at least 1 paper in 2015.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2015

The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE).

Yu-Hsin Lin, Yuan-Chieh Cheng, Nien-Nan Chu, Wensyang Hsu, Yu-Hsiang Tang, Po-Li Chen, Chih-Chung Yang, Ming-Hua Hsiao, Chien-Nan Hsiao

Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015