Sigeru Hayama

According to our database, Sigeru Hayama authored at least 1 paper in 1991.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

1991

Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system).

Yoshihiko Hirai, Sadafumi Tomida, Kazushi Ikeda, Masaru Sasago, Masayuki Endo, Sigeru Hayama, Noboru Nomura

IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1991