Y. S. Zheng

According to our database1, Y. S. Zheng authored at least 2 papers in 2003.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of five.

Timeline

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Article 
PhD thesis 
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Links

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Bibliography

2003
Investigation of defect on copper bond pad surface in copper/low k process integration.
Microelectron. Reliab., 2003

Polymer residue chemical composition analysis and its effect on via contact resistance in dual damascene copper interconnects process integration.
Microelectron. J., 2003


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