Yuya Tsukamoto

According to our database, Yuya Tsukamoto authored at least 2 papers between 2018 and 2019.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of six.

2019

Etching Control of HfN Encapsulating Layer for PtHf-Silicide Formation with Dopant Segregation Process.

Shun'ichiro Ohmi, Yuya Tsukamoto, Rengie Mark D. Mailig

IEICE Trans. Electron., 2019

2018

PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) Realized by Dopant Segregation Process.

Shun'ichiro Ohmi, Yuya Tsukamoto, Weiguang Zuo, Yasushi Masahiro

IEICE Trans. Electron., 2018